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Manufacturing process
 
Specifications
 
R&D and Publications


 

InPACT is currently in the process of optimizing the crystal growth and processing of 6" InP materials (cost and quality consistency).

 
 

 

List of publications by InPACT's scientists related to bulk crystal and surface:

BULK

1) Modelling of Dislocation Generation in lnP crystal growth
S. Gondet, T. Duffar, G. Jacob, N. Van Den Bogaert, F. Louchet, 1999 IPRM, Davos, Switzerland.
2) Improvement of crystalline quality of 3" diameter lnP wafers for micro electronics applications
S. Gondet, T. Duffar, G. Jacob, N. Van Den Bogaert, F. Louchet, 1998 IPRM, Tsukuba, Japan.
3) Thermal stress simulation and interface destabilization in lnP grown by LEC process
S. Gondet, T. Duffar, G. Jacob, N. Van Den Bogaert, F. Louchet, 1998 Int. Conf. on Crystal Growth, Jerusalem, Israel.

 
 



SURFACE

1) Improvement of the surface quality of polished lnP wafers using TOF-SIMS as characterization
N. Thomas, G. Jacob and H. Hardtegen, 1998 IPRM, Tsufaiba, Japan.
2) Improvement of the surface quality of polished lnP wafers
G. Jacob, Ph. Regreny, N. Thomas and H. Hardtegen, 1997 IPRM, Cape Cod, USA.